TEM - FIB Laboratory



In this lab, two major facilities TEM (Transmission Electron Microscope) and FIB (Focused Ion Beam system) have been installed. Our TEM is equipped the field emission type of electron source, and it is used for nano-scale observation and analysis with user-friendly interface and under high-stable beam condition. The microscope also equipped EDX detector and the post-column-type energy filter camera, using these sub systems, energy filtered HRTEM imaging, EELS analysis. The dual beam type of FIB is generally used to fabricate TEM sample from various type of samples, such as rock and bio-related materials. The Visual stage linkage is also established in the FIB system, therefore, we can operate FIB and fabricate the thin film based on the spatial information such as elemental mapping.


TEM Laboratory - Spherical Image - RICOH THETA

FIB Sample Preparation Room
FIB (Focused Ion Beam) Instrument
TEM (Transmission Electron Microscopy) Instrument

Technical Utilities

  • TEM: JEOL JEM-2100F with GATAN GIF Tridiem
  • FIB: JEOL JIB-4500

Analytical Capabilities

  • TEM: Acc. Voltage : 200kV, Max resolution: 0.23 nm (point), 0.10 nm (lattice), EDX detector
  • FIB: LaB6 electron source, Ga ion source, Carbon or Tungsten deposition gun

Related work